There are many kinds of aluminum oxide in the market,which are used in different fields.
For silicon wafer lapping,usually use platelet white calcined aluminum oxide,which is plate-shape and the specification is as follows:
AVERAGE CHEMICAL COMPOSITION(TYPICAL)
Al2O3 >99.0%
SiO2 <0.2%
Fe2O3 <0.1%
Na2O <1%
PHYSICAL PROPERTIES(TYPICAL)
Mohs Hardness 9.0
Specific Gravity >3.9g/cm3
Shape Plate-shape
PARTICLE SIZE DISTRIBUTION
SIZE | D0 | D3 | D50 | D94 |
PWA/WCA40 | <77.6 | 39-44.6 | 27.7-31.7 | 18-20 |
PWA/WCA35 | <64.2 | 35.4-39.8 | 23.8-27.2 | 15-17 |
PWA/WCA30 | <50.4 | 28.1-32.3 | 19.2-22.3 | 13.4-15.6 |
PWA/WCA25 | <40.1 | 24.4-28.2 | 16.1-18.7 | 9.6-11.2 |
PWA/WCA20 | <32.0 | 20.9-24.1 | 13.1-15.3 | 8.2-9.8 |
PWA/WCA15 | <25.2 | 14.8-17.2 | 9.4-11 | 5.8-6.8 |
PWA/WCA12 | <20.3 | 11.8-13.8 | 7.6-8.8 | 4.5-5.3 |
PWA/WCA09 | <16.3 | 8.9-10.5 | 5.9-6.9 | 3.3-3.9 |
PWA/WCA05 | <12.5 | 6.6-7.8 | 4.3-5.1 | 2.55-3.05 |
PWA/WCA03 | <10.0 | 4.8-5.6 | 2.8-3.4 | 1.5-2.1 |