What kind of aluminum oxide is used for Silicon Wafer Lapping

There are many kinds of aluminum oxide in the market,which are used in different fields.

For silicon wafer lapping,usually use platelet white calcined aluminum oxide,which is plate-shape and the specification is as follows:

AVERAGE CHEMICAL COMPOSITION(TYPICAL)             

Al2O3                                                 >99.0%

SiO2                                                  <0.2%

Fe2O3                                              <0.1%

Na2O                                                <1%

PHYSICAL PROPERTIES(TYPICAL)  

Mohs Hardness                             9.0

Specific Gravity                         >3.9g/cm3

Shape                                            Plate-shape

PARTICLE SIZE DISTRIBUTION

SIZED0D3D50D94
PWA/WCA40<77.639-44.627.7-31.718-20
PWA/WCA35<64.235.4-39.823.8-27.215-17
PWA/WCA30<50.428.1-32.319.2-22.313.4-15.6
PWA/WCA25<40.124.4-28.216.1-18.79.6-11.2
PWA/WCA20<32.020.9-24.113.1-15.38.2-9.8
PWA/WCA15<25.214.8-17.29.4-115.8-6.8
PWA/WCA12<20.311.8-13.87.6-8.84.5-5.3
PWA/WCA09<16.38.9-10.55.9-6.93.3-3.9
PWA/WCA05<12.56.6-7.84.3-5.12.55-3.05
PWA/WCA03<10.04.8-5.62.8-3.41.5-2.1

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