ALUMINUM OXIDE SIZES FOR LAPPING SILICON WAFER
There are many kinds of aluminum oxide in the market.
Due to manufacturing technique,there are calcined aluminum oxide and fused aluminum oxide.
According to crystalline phase,there are α-aluminum oxide and β-aluminum oxide.
Then what kind of aluminum oxide is used for lapping silicon wafer?
It is a kind of white platelet calcined aluminum oxide,zhengzhou haixu abrasive co.,ltd,produced it for many year,which quality is similiar to JAPAN FUJIMI and USA Microgrit WCA.
The sizes haixu abrasives produce are as follows?
| SIZE | D0 | D3 | D50 | D94 |
| HX-PWA/WCA40 | <77.6 | 39-44.6 | 27.7-31.7 | 18-20 |
| HX-PWA/WCA35 | <64.2 | 35.4-39.8 | 23.8-27.2 | 15-17 |
| HX-PWA/WCA30 | <50.4 | 28.1-32.3 | 19.2-22.3 | 13.4-15.6 |
| HX-PWA/WCA25 | <40.1 | 24.4-28.2 | 16.1-18.7 | 9.6-11.2 |
| HX-PWA/WCA20 | <32.0 | 20.9-24.1 | 13.1-15.3 | 8.2-9.8 |
| HX-PWA/WCA15 | <25.2 | 14.8-17.2 | 9.4-11 | 5.8-6.8 |
| HX-PWA/WCA12 | <20.3 | 11.8-13.8 | 7.6-8.8 | 4.5-5.3 |
| HX-PWA/WCA09 | <16.3 | 8.9-10.5 | 5.9-6.9 | 3.3-3.9 |
| HX-PWA/WCA05 | <12.5 | 6.6-7.8 | 4.3-5.1 | 2.55-3.05 |
| HX-PWA/WCA03 | <10.0 | 4.8-5.6 | 2.8-3.4 | 1.5-2.1 |
Therein HX-PWA/WCA09,HX-PWA/WCA12 and HX-PWA/WCA15 are used for lapping silicon wafer widely.
